The GCIB 10S at a glance
Argon clusters are formed by adiabatic expansion of high-pressure gas through a thin nozzle.
Two turbo molecular pumps help keep vacuum levels in the upper column below 5×10-7 mbar.
Neutral clusters are ionised through electron bombardment and accelerated up to 10 keV.
A Wien filter controls the mass of clusters reaching the target.
A gate valve is included for fast, safe venting of the source without exposing the chamber to air.
An NW63CF flange ensures compatibility with a wide range of vacuum chambers.
Electrostatic scan plates and a final focusing lens control the beam on the sample.