Floating Low Energy Ion Beam

The FLIG® 5 is floating low energy ion beam system designed primarily for use on SIMS depth profiling instruments. It has a floating column which transports O2+ ions at relatively high energy prior to deceleration in the final lens. This enables it to deliver a probe of high current density at beam energies as low as 200 eV. This low energy performance makes the FLIG® 5 a powerful tool for shallow depth profiling.


  • Option of O2 or Cs source
  • 200 eV to 5 keV Energy Range
  • Ideal for shallow depth profiling