Multi Axis UHV Pecision Stages

Precision stages designed to meet the needs of UHV environments. Latest technology of piezo-electric motors coupled with encoders on all axes ensuring <1um positioning (0.1deg rotation).

The stage systems are supplied as complete with controller, cables, vacuum flange connections and software interface.

A multi-axis controller interfaces to the stage motors and encoders.

Computer controlled via USB or RS232 and supplied with manual jojstick contol box.

Key Features:

High resolution

Non magnetic

UHV compatability 10-10 torr

Long travel

Wide range of speed control

Inherent brake at power off.

No backlash

3,4 or 5 axes available

Heat/cool option (+600C/-150C)

120C bakeout

The software interface IG-SOFT 400 provides the user with full positioning control of all of the axes. Encoder readbacks are constantly displayed to confirm the true position.

These stages have been designed for use in a wide range of applications, including:

SEM, TEM, XPS, AES, SIMS & Micro-Machining.