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Gas Cluster Ion Beams

Thumbnail The GCIB 40 is a high performance Cluster Ion Source, intended for use as a primary ion source on the J105 SIMS. It is capable of operating at 10, 20, 30 and 40 keV, with Ar1000 to Ar4000 clusters. The column is fitted with a mass filter, adjustable aperture drive and fast pulsing. It is able to...
Thumbnail The GCIB 20 is a 20 keV argon cluster ion beam system, designed to produce a focussed beam of argon clusters, with a range of selectable cluster sizes from Ar2 to over Ar2000. With Ar1000 clusters a spot size below 7 μm is  available.     The massive clusters are less damaging, for some organic...
Thumbnail The GCIB 10S is a 10 keV argon cluster ion beam system, designed for easy installation on a wide range of surface analysis instruments. It provides an economical means of upgrading XPS, SIMS or other systems to use cluster beam sputtering for sample cleaning or depth profile analysis.       The System The GCIB...

C60 Ion Beams

Thumbnail The IOG C60-40 provides a highly focussed C60 cluster ion beam for molecular SIMS analysis. The use of high mass primary ions provides a substantial yield enhancement of intact molecules and large fragments during the analysis of most organic surfaces. The high voltage and demagnifying optics of the...
Thumbnail The IOG C60-20 is a high performance tool for SIMS analysis of samples with a high degree of chemical complexity. The use of high mass primary ions provides a substantial yield enhancement of intact molecules and large fragments during the analysis of most organic materials. Sputtering Mechanism The C60...
Thumbnail The IOG C60-10 was developed by Ionoptika in co-operation with Ulvac Phi Corporation as a tool for sputter cleaning and depth profiling of samples for XPS and Auger. The use of a C60 (fullerene) ion beam results in rapid etching with very low damage to the underlying sample. The IOG C60-10...

Liquid Metal Ion Beams

Thumbnail The IOG 25GA is a high performance gallium ion beam system, designed for use in micromachining and imaging SIMS applications. It offers a wide current range with fine probe capability and d.c. or pulsed operation. A p.c. control interface allows easy setup and monitoring of the gun.   The IOG 25GA...
Thumbnail The IOG 25AU is a high performance Liquid Metal Ion Gun system designed to provide a range of gold and gold cluster ion beams for SIMS applications. It offers a wide current range with fine probe capability and d.c. or pulsed operation. Digital control allows easy setup of the gun and a provision...

Duoplasmatron Beams

Thumbnail The IOG 30D provides a highly focussed ion beam for contaminant free micromachining or analysis of small areas. It uses a duoplasmatron ion source and two-lens optical column to produce a high-brightness, low-aberration spot. A selection of 5 apertures allows a wide current range. The Source runs on pure argon (or other noble gases), nitrogen, or...
Thumbnail The FLIG 5 is an ion gun system ideal for use on SIMS depth profiling instruments. It has a floating column which transports O2+ ions at relatively high energy prior to deceleration in the final lens. Thus, it can deliver a probe of high current density at beam energies as low as 200eV. This low energy performance makes the FLIG 5 a powerful tool for...