IOG
5D
- Energy range: 1keV to 5keV
- Spot size at 5keV, 500nA: < 15 microns (>280mAcm-2)
- Minimum spot size at 5keV: < 5 microns
IOG
5D |
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| The IOG 5D Duoplasmatron Ion Gun is designed to produce a good probe shape with high current density across a wide range of spot sizes. It is suitable for both dynamic SIMS and imaging SIMS applications | |||||||||
| The standard duoplasmatron source runs Oxygen, but can be converted to run pure Argon, Helium, Hydrogen or Xenon with minor modification. The exit aperture of the duoplasmatron forms a high brightness source, enabling the formation of an intense probe. The ion-optical column is a two-lens system with a selectable aperture, nominally for definition of the intermediate field image. The column also includes a wien filter for mass filtering of the beam, a bend for rejection of neutrals and a miniature successive scanning unit. | |||||||||
| The electronics package consists of a 3U 19 inch controller optically linked to a 6U power supply box, the latter supplying all voltages (other than rasters) required by the source and column for d.c. operation. The controller is processor based and offers many useful features, for example displays of all voltages or currents and save buttons for up to seven complete sets of operating conditions. | |||||||||
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| IOG 5D Ion Gun Controller | |||||||||
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