IOG
30D
- Energy range: 5keV to 30keV
- Spot size at 30keV, 500nA: < 10 microns (>280mAcm-2)
- Minimum spot size at 30keV: < 300 nm
IOG
30D |
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| The IOG 30D Duoplasmatron Ion Gun is designed to produce a good probe shape with very high current density and small spot sizes. It is suitable for inert gas ion micromachining and dynamic SIMS and imaging SIMS applications. | |||||||
| The duoplasmatron source runs Oxygen, Argon, Helium, Hydrogen or Xenon, all as pure gases. The exit aperture of the duoplasmatron forms a high brightness source, enabling the formation of an intense probe. The ion-optical column is a two-lens system with a selectable aperture, nominally for definition of the intermediate field image. The column also includes a wien filter for mass filtering of the beam, a bend for rejection of neutrals and a miniature successive scanning unit. | |||||||
| The electronics package consists of a 6U, 19 inch rack-mountable power supply which provides all voltages (other than rasters) required by the source and column for d.c. operation. Control is via a software interface which is provided on disc for pc installation. This includes a number of helpful features such as the facility to store sets of voltages for quick set-up of the column, voltage scanning with graphical display of current monitors and more. | |||||||
| Performance | |
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| The first IOG 30D was supplied by the order of The National Institute for Materials Science under the scheme for Development of Systems and Technology for Advanced Measurement and Analysis, sponsored by Japan Science and Technology Agency. Our thanks go to NIMS for providing the image (right) acquired with the IOG 30D installed on their SEM. | |||||||
| SED image of a 25 micron grid, showing resolution less than 100nm - using 50pA of He+ at 30keV | |||||||