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1 keV Elektron Beam (Ion Gun)

The IOE 10 Electron Gun is designed primarily for charge neutralisation during analysis of insulating materials. It provides high beam current density over a wide range of energy, from 10 microamps into 50 microns at 1000 eV to 1 microamp into 1 mm at 10 eV.

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Low Energy to Reduce ESD


The low energy range is particularly suited to applications where electron stimulated desorption of ions (ESD) from the surface must be limited. ESD is generally seen to fall off as the electron impact energy reduces below 40eV. Use of low energy electrons also reduces localised heating of the sample surface.

 

Easy to Install


It is compact, fitting via an NW35CF flange, and can be made to suit any port to sample distance. A port aligner can also be fitted if required; this is especially useful for targetting the gun at low energy, when the beam is susceptible to any fields near the sample. The power supply is 1 U in height, for installation into a standard 19 inch electronics rack.

 

Easy to Use


Control of the electron gun is via a software interface. In addition to providing control of voltages, the software includes other convenient features, for instance the facility to store sets of operating conditions. This greatly simplifies switching between beam energies.

The IOE 10 can be pulsed, for TOF SIMS application. It is equipped with quadrupole deflection plates which can be used for static beam positioning or for rastering using an external scan system.

 

Imaging With the IOE 10


Whilst the IOE 10 is not intended to be used for imaging, it is a suitable means of demonstrating the gun’s spot size performance. The three images opposite show a 5 mm wide aperture strip with 1 mm apertures in the foreground. The 1 mm hole is still resolved by the 10 eV beam.

 

IOE 10 Specification


  • Energy range 10 ev to 1 keV
  • Current Density at 10 eV: 0.2 mAcm-2
  • Current Density at 1 keV: 500 mAcm-2

 

Dimensions


The diagram below shows the main dimensions of the mechanical assembly. The reach ‘A’ and the beam shield ‘B’ can be specified when ordering the gun. We would be pleased to discuss any other special requirements.

IOE 10 Electron Gun - current vs spot size for energy range 10 eV to 1000 eV (working distance 38 mm)

  • Energy range 10 to 1000eV
  • High current density
  • Pulsing capability
  • Digital control with presets
  • Length customised to order