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Duoplasmatron Ion Beam

Thumbnail The IOG 30D provides a highly focussed ion beam for contaminant free micromachining or analysis of small areas. It uses a duoplasmatron ion source and two-lens optical column to produce a high-brightness, low-aberration spot. A selection of 5 apertures allows a wide current range. The Source runs on pure argon (or other noble gases), nitrogen, or oxygen and a mass filter is included in the column to separate beams of different charge/mass ions. A gate valve in the column allows the source to...
Thumbnail The FLIG 5 is an ion gun system ideal for use on SIMS depth profiling instruments. It has a floating column which transports O2+ ions at relatively high energy prior to deceleration in the final lens. Thus, it can deliver a probe of high current density at beam energies as low as 200eV. This low energy performance makes the FLIG 5 a powerful tool for shallow depth profiling. Realistic analysis time can be achieved at low energies with high depth resolution and high dynamic range. The FLIG 5...