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A duoplasmatron system which can provide noble gas beams with less than 100nm spot size, for micromachining of lamellae or other nano-structures which would be impaired by liquid metal beams.
A C60 Ion beam system for high spatial resolution ToF SIMS analysis of organic samples in two or three dimensions.
An ion beam system designed in collaboration with the Ulvac-Phi group for sputter cleaning and depth profiling..
A high performance, low noise fully integrated imaging system with Raster control, framegrabber, computer controlled PSU and a comprehensive image analysis software package.