The RSU 2000 is a fully integrated beam scanning system for use in conjunction with ion or electron beam systems for imaging, micromachining and lithography.

Designed for simple integration with both Ionoptika and third party systems, it can

drive up to 3 scan outputs simultaneously, with independent control over offset, gain and rotation for each output. The scan generator is fully computer controlled via a USB2 interface. The scan generator communicates with its remote scan amplifier via a 25Mbps isolated digital interface. This eliminates noise pick-up associated with analogue ramp outputs.

Software Controls

Image X&Y shift This shifts the imaged area around inside the total scan field.
Magnification X and Y independent gain adjustment
Scan Rotation 0 to 360 degrees
X&Y Pixel Position This is an X and Y pixel shift which allows the beam to be set to a particular pixel value.
Scan Type This selects the type of raster being used. The options are:

Raster
This is a slow scan raster, with the X pixels/line, Y lines & dwell time selectable.
External XY
This uses the external ramps being fed to the X and Y inputs.
Line
This rasters an X line scan on the sample, at the selected Y pixel which can then be rotated over 360 degrees.
Spot
This leaves the beam stationary at the selected X and Y pixels.

X Line This sets the number of pixels in the X line to be rastered in a slow scan or line scan. The rasters available are: 4 x 4 to 2048 x 2048.
Y Line This sets the number of X lines in a frame.
Dwell time This sets the dwell time for each pixel before stepping to next pixel position and is specified in µsec. The range is 2 µs to 64,000 µs.
Dither A dither function is provided to scan the beam within each pixel, e.g. when using a focused beam within a largepixel size.
Pixel Integration Data acquired from multiple frames can be merged to provide an enhanced image.

Inputs and Outputs

Mains Power The unit has universal mains 90 Vac to 260 Vac.There must be an earth line in the mains power cable.
Pixel in This is the input for the External Pixel Clock. The clock pulse should conform to TTL standard, and can be up to 1 MHz.
Pixel Out This is TTL output of the Pixel Clock. The output is TTL, with the rising edge indicating the start of a new output pixel position.
Line Provides a TTL pulse at the start of each Line.
Frame Provides a TTL pulse at the start of each Frame.
X Mon In Input for an externally generated X ramp , at ± 10 V full scale.
X Mon Out A ± 10 V output of the ramp being used by the scan amplifier.
Y Mon In Input for an externally generated Y ramp , at ± 10 V full scale.
Y Mon Out A ± 10 V output of the ramp being used by the scan amplifier.
Blanking 4 programmable TTL blanking outputs are provided.