C60 Ion Beams

IOG C60-20

20kV C60 Ion Gun System designed with fast pulsing capability for Time of Flight SIMS applications.

40kV C60 Ion Gun System designed with fast pulsing capability for high spatial resolution in Time of Flight
SIMS.

IOG C60-10

10kV C60 Ion Gun System designed for low damage etching/profiling in XPS analysis and is available on surface analysis tools from the Ulvac-Phi group.

Duoplasmatron Ion Beams

FLIG 5

The FLIG 5 provides exceptional depth resolution in SIMS analysis of shallow interfaces. It is also a powerful tool for fine polishing of small areas.

IOG 5D

IOG 5D Duoplasmatron Ion Gun: designed to produce a good probe shape with high current density across a wide range of spot sizes. It is suitable for both dynamic SIMS and imaging SIMS applications.

IOG 30D Duoplasmatron Ion Gun: designed for high current density in a very small spot size. suitable for inert gas micromachining of lamellae or other nano-structures which are impaired by liquid metal beams.

Liquid Metal Ion Beams

IOG 25Ga

25kV Gallium: Liquid Metal Ion Gun:

A microfocus ion gun, for pulsed (TOF-SIMS), or d.c. operation. The IOG 25 is a compact high performance Gallium Ion Gun which provides wide current range, and high spatial resolution.

IOG 25Au

25kV Gold: Liquid Metal Ion Gun.

A microfocus ion gun, for pulsed (TOF-SIMS), or d.c. operation. The IOG 25 is a compact high performance Gold Ion Gun with Wien Filter which provides a wide current range, and high spatial resolution.