C60 Ion Beams

IOG C60-20

20 kV C60 Ion Gun System designed with fast pulsing capability for Time of Flight SIMS, chiefly aimed at analysis of organic materials.

IOG C60-40

40 kV C60 Ion Beam System for ToF-SIMS applications requiring sub-micron spatial resolution and high yields of organic secondary ions.

IOG C60-10

10 kV C60 Ion Gun System designed for low damage etching/profiling in XPS analysis and is available on surface analysis tools from the Ulvac-Phi group.

Duoplasmatron Ion Beams

FLIG 5

The FLIG 5 is a low energy ion beam system for use on shallow profiling instruments to provide exceptional depth resolution in SIMS analysis of shallow interfaces. It is also a powerful tool for fine polishing of small areas.

IOG 5D

IOG 5D Duoplasmatron Ion Gun: designed to produce a good probe shape with high current density across a wide range of spot sizes. It is suitable for both dynamic SIMS and imaging SIMS applications.

Liquid Metal Ion Beams

IOG 25Ga

25 kV Gallium: Liquid Metal Ion Gun:

A microfocus ion gun, for pulsed (TOF-SIMS), or d.c. operation. The IOG 25Ga is a compact high performance Gallium Ion Gun which provides wide current range, and high spatial resolution.

IOG 25Au

25 kV Gold: Liquid Metal Ion Gun.

A microfocus ion gun, for pulsed (TOF-SIMS), or d.c. operation. The IOG 25Au is a compact high performance Gold Ion Gun with Wien Filter which provides a wide current range, and high spatial resolution.