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The
IOG C60-40 provides a C60 ion beam with energy up to 120keV (with
triple charge) and spot size down to <300nm for SIMS molecular
analysis.
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IOG C60-40 ion source and column (including
focussing, scan plates, mass filter, alignment and gate valve)
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Computer controlled HV electronics mounted
in a 19inch wide x 6U high chassis.
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| Performance: |
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- Beam energy: 10 to 40keV (30 to 120keV
with triple charge beam)
- Beam current: > 1nA
- Minimum spotsize: < 0.3um
- Maximun FOV @ 40kV : 1mm x 1mm
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| Applications:
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Please click here for a detailed product
information sheet
on the IOG-C60-40.
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