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The
IOG C60-20 is a high performance tool for SIMS analysis of surfaces
with a high degree of chemical complexity.
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C60 ion source and column (including focussing,
scan plates, mass filter, alignment and gate valve)
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Computer controlled HV electronics mounted
in a 19inch wide x 6U high chassis.
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| Performance: |
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- Beam energy: 10 to 20kV
- Beam current > 2nA
- Minimum spotsize <2um
- Maximun FOV@20kV : 2mm x 2mm
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| Applications:
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Please click here for a detailed product
information sheet on the
IOG C60-20.
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