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- IOG 25Ga........25keV Gallium
Liquid Metal Ion Gun with 25nm spotsize.
- SED 02............Secondary
electron/ion detector for image generation.
- XYZ 01...........4 Axis stage with piezo-electric
motors, 1um precision, +/- 25mm movement, computer controlled.
- IGM 200.........Image capture and micro-machining
system with advanced software features.
- Computer controlled/ automated vacuum pump system and control.
- UHV multiport, thick walled chamber.
- Anti-vibration table with self regulating air mounts.
- Integrated bakeout with temperature control.
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